ESCA (Electron Spectroscopy for Chemical Analysis)

E681655

ESCA (Electron Spectroscopy for Chemical Analysis) is a surface-sensitive analytical technique, also known as X-ray photoelectron spectroscopy (XPS), used to determine the elemental composition and chemical states of materials.

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Statements (50)

Predicate Object
instanceOf X-ray photoelectron spectroscopy technique ⓘ
electron spectroscopy method ⓘ
surface-sensitive analytical technique ⓘ
abbreviationFor Electron Spectroscopy for Chemical Analysis ⓘ
alsoKnownAs X-ray photoelectron spectroscopy ⓘ
analysisMode high-resolution core-level scan ⓘ
survey scan ⓘ
basedOnPhysicalEffect photoelectric effect ⓘ
canDetect all elements except hydrogen and helium ⓘ
canDistinguish different chemical states of the same element ⓘ
canMap lateral distribution of elements on surfaces ⓘ
canPerform depth profiling with ion sputtering ⓘ
canQuantify atomic concentration of elements ⓘ
commonlyUsedFor adhesion and interface studies ⓘ
catalyst surface analysis ⓘ
characterization of thin films and coatings ⓘ
corrosion studies ⓘ
polymer surface characterization ⓘ
semiconductor device characterization ⓘ
surface analysis of solids ⓘ
dataOutput intensity versus binding energy plot ⓘ
photoelectron spectrum ⓘ
detects photoelectrons emitted from a sample ⓘ
developedBy Kai Siegbahn ⓘ
developmentPeriod 1960s ⓘ
energyScale binding energy in electronvolts ⓘ
excitationSource Al Kα X-rays ⓘ
Mg Kα X-rays ⓘ
monochromatic X-ray source ⓘ
fullName Electron Spectroscopy for Chemical Analysis ⓘ
isSurfaceSensitive true ⓘ
limitation limited sensitivity to light elements like hydrogen ⓘ
requires vacuum-compatible samples ⓘ
measures binding energies of core-level electrons ⓘ
chemical states of elements ⓘ
elemental composition of material surfaces ⓘ
oftenCalibratedUsing C 1s peak of adventitious carbon ⓘ
providesInformationOn chemical bonding environment ⓘ
oxidation states ⓘ
surface contamination ⓘ
thin film composition ⓘ
relatedTechnique Auger electron spectroscopy ⓘ
secondary ion mass spectrometry ⓘ
ultraviolet photoelectron spectroscopy ⓘ
requires ultra-high vacuum conditions ⓘ
requiresCalibrationWith reference binding energies ⓘ
spatialResolution typically tens of micrometers ⓘ
typicalAnalysisDepth 1–10 nanometers ⓘ
typicalPressureRange 10^-9 to 10^-7 mbar ⓘ
usesRadiationType X-rays ⓘ

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Referenced by (6)

Full triples — surface form annotated when it differs from this entity's canonical label.

Kai Siegbahn → developed → ESCA (Electron Spectroscopy for Chemical Analysis) ⓘ
ESCA → fullName → Electron Spectroscopy for Chemical Analysis ⓘ
linked to: ESCA (Electron Spectroscopy for Chemical Analysis)
ESCA → alsoKnownAs → X-ray photoelectron spectroscopy ⓘ
linked to: ESCA (Electron Spectroscopy for Chemical Analysis)
ESCA → abbreviationOf → Electron Spectroscopy for Chemical Analysis ⓘ
linked to: ESCA (Electron Spectroscopy for Chemical Analysis)
ESCA → fullName → Electron Spectroscopy for Chemical Analysis ⓘ
linked to: ESCA (Electron Spectroscopy for Chemical Analysis)
ESCA → abbreviationFor → Electron Spectroscopy for Chemical Analysis ⓘ
linked to: ESCA (Electron Spectroscopy for Chemical Analysis)