MIT Microsystems Technology Laboratories

E313798

MIT Microsystems Technology Laboratories is a research center at the Massachusetts Institute of Technology focused on advancing micro- and nanoscale technologies, including microelectronics, MEMS, and related microsystems.

All labels observed (1)

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MIT Microsystems Technology Laboratories canonical 2

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Statements (47)

Predicate Object
instanceOf academic research laboratory ⓘ
research center ⓘ
affiliatedWith Massachusetts Institute of Technology ⓘ
collaboratesWith MIT Department of Electrical Engineering and Computer Science ⓘ
MIT Department of Materials Science and Engineering ⓘ
MIT Department of Mechanical Engineering ⓘ
country United States ⓘ
fieldOfResearch MEMS ⓘ
VLSI ⓘ
actuators ⓘ
integrated circuits ⓘ
microelectromechanical systems ⓘ
microelectronics ⓘ
microfabrication ⓘ
microsystems ⓘ
microsystems integration ⓘ
nanofabrication ⓘ
nanoscale technologies ⓘ
nanotechnology ⓘ
optoelectronics ⓘ
photonics ⓘ
semiconductor devices ⓘ
sensors ⓘ
focusesOn advancing micro- and nanoscale technologies ⓘ
development of related microsystems ⓘ
research in microelectronics and MEMS ⓘ
hasLanguage English ⓘ
locatedIn Massachusetts Institute of Technology ⓘ
locatedInCity Cambridge, Massachusetts ⓘ
locatedInState Massachusetts ⓘ
locatedOnCampus MIT campus ⓘ
operatesAs interdisciplinary research laboratory ⓘ
partOf MIT School of Engineering ⓘ
researchArea RF and high-frequency microsystems ⓘ
advanced lithography ⓘ
bio-microsystems ⓘ
device fabrication ⓘ
energy-efficient microsystems ⓘ
heterogeneous integration ⓘ
micro- and nano-actuators ⓘ
micro- and nano-sensors ⓘ
microsystem design ⓘ
nanodevices ⓘ
process technology ⓘ
system-on-chip technologies ⓘ
thin-film technologies ⓘ
sector higher education ⓘ

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Referenced by (2)

Full triples — surface form annotated when it differs from this entity's canonical label.

MIT laboratories → hasPart → MIT Microsystems Technology Laboratories ⓘ
MTL → fullName → MIT Microsystems Technology Laboratories ⓘ